Lam Research Unveils Breakthrough Etch Technology for Advanced 3D Chip Packaging

Lam Research announces a new etching solution designed to improve 3D chip packaging. The Kiyo etch system tackles wafer warping issues, enabling precise etching for advanced semiconductor manufacturing.

Author: Vidyesh Swar Published Date: 14 October 2025
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Lam Research Unveils Breakthrough Etch Technology for Advanced 3D Chip Packaging

Lam Research Unveils Breakthrough Etch Technology for Advanced 3D Chip Packaging

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Lam Research Corporation (NASDAQ: LRCX) has emerged as one of the top-performing NASDAQ stocks favored by hedge funds. On October 2, the company unveiled a significant advancement in etching technology, tailored specifically for next-generation semiconductor packaging, a key component in enabling heterogeneous integration and 3D chip designs.

This new development centers around an enhanced Kiyo etch solution capable of processing high-bow wafers mounted on glass carriers. These types of wafers often warp during advanced packaging steps, posing significant manufacturing challenges. Lam’s innovation effectively addresses this issue by allowing for precise and consistent etching, even on deformed wafers, thus supporting the fabrication of complex device architectures.

The cutting-edge etch technology supports tighter interconnect spacing and enhances the reliability of through-silicon vias (TSVs), both of which are essential for stacking chips more efficiently. This is a critical step toward achieving higher memory density, improved power efficiency, and faster data transfer rates.

Lam Research also highlighted that the updated Kiyo etch system is fully compatible with glass carrier processes an emerging standard in the industry due to their superior thermal and mechanical properties, especially when working with ultra-thin, high-bow silicon wafers.

As a leading supplier of semiconductor manufacturing equipment, Lam Research develops essential systems for etching, deposition, and cleaning used in building advanced integrated circuits. Its offerings include plasma etch tools, chemical vapor deposition (CVD) systems, atomic layer deposition (ALD) platforms, and a range of wafer cleaning technologies all of which are critical for modern chip fabrication.

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